Thermoelectric process thermostats from -20 to 90°C
Semistat product line
Based on the tried-and-tested principles of heat transfer used for Peltier elements, the LAUDA Semistat thermoelectric systems for temperature control offer reproducible temperature control for plasma etching applications. The dynamic temperature control of the electrostatic wafer chuck (ESC) makes it possible to use devices with all types of etching processes. Energy-efficient and space-saving, with stable temperature control, these clever systems are perfect for manufacturing ever-smaller components.
