Semistat product line

Thermoelectric process thermostats from -20 to 90°C

Semistat product line

Based on the tried-and-tested principles of heat transfer used for Peltier elements, the LAUDA Semistat thermoelectric systems for temperature control offer reproducible temperature control for plasma etching applications. The dynamic temperature control of the electrostatic wafer chuck (ESC) makes it possible to use devices with all types of etching processes. Energy-efficient and space-saving, with stable temperature control, these clever systems are perfect for manufacturing ever-smaller components.

Thermoelectric process thermostats from -20 to 90°C

Overview of all Semistat devices

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Semistat Thermoelectric thermostat

Semistat Thermoelectric thermostat

Thermo-electric process thermostats for the semiconductor industry from -20 to 90 °C

Cooling output from 1.2 kW to 4.4 kW

Heating output from 3 kW to 12 kW

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-20 to 90 °C

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Puneet Chavan
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+44 1780 243118
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Overview of all device types

Select the desired working temperature to narrow down the list

Working temperature (°C)

Product Min. temperature range Max. working temp Heating output Cooling output at 20 °C 50 Hz Compare product
Semistat S 1200 -20 °C 90 °C 3 kW 1.2 kW
Semistat S 2400 -20 °C 90 °C 6 kW 2.45 kW
Semistat S 4400 -20 °C 90 °C 12 kW 4.4 kW
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Applications and industry examples for LAUDA thermostats

Semiconductor industry

Semiconductor industry

In the production of semiconductors and testing of electronic components, there are numerous processes whose temperature must be controlled precisely.

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LAUDA SCIENTIFIC

LAUDA SCIENTIFIC

Are you seeking measuring instruments that are precise and reliable and ensure a long service life?

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