Semistat Thermoelectric thermostat
Thermo-electric process thermostats for the semiconductor industry from -20 to 90 °C
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Back to overview Circulation and process thermostats

Thermoelectric process thermostats from –20 to 90 °C for the semiconductor industry

Fast and precise temperature control for complex processes. Based on the tried-and-tested principles of heat transfer used for Peltier elements, the LAUDA Semistat thermoelectric systems for temperature control offer reproducible temperature control for plasma etching applications.

The dynamic temperature control of the electrostatic wafer chuck (ESC) makes it possible to use devices with all types of etching processes.

Energy-efficient and space-saving, with stable temperature control, these clever systems are perfect for manufacturing ever-smaller components.

Overview

Benefits and added value

  • Compressor and refrigerant-free system with low energy consumption
  • Smallest footprint in the industry, ideally suited for underfloor installation
  • Extremely low volume of heat transfer fluid

Working range

Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity.

Min. working temperature

Min. working temperature

-20 °C

Max. working temperature

Max. working temperature

90 °C

Temperature stability

Temperature stability

0.1 ± K

Product lines

Select up to 4 technical parameters that you want to display in the table

ProductMin. working tempMax. working tempHeater power max.Cooling output at 20 °C 60 HzCompare product
Semistat S 1200 -20 °C 90 °C 3 kW 1.2 kW Details
Semistat S 2400 -20 °C 90 °C 6 kW 2.45 kW Details
Semistat S 4400 -20 °C 90 °C 12 kW 4.4 kW Details

Device dimensions

194 x 300 x 560 mm

Semistat S 4400

116 x 232 x 470 mm

Semistat S 1200

116 x 300 x 560 mm

Semistat S 2400

Characteristics

Downloads - general product data

Please select which documents you would like to see in which language:

Available documents
Available languages
DeviceDevice categoryDocument typeLanguageFormatFile size
Chapter Circulation and process thermostats
Overall brochure 		Process thermostats Brochure
English
PDF 4,84 MB Download document Download document
Thermoelectric process thermostats Process thermostats Brochure
English
PDF 864,69 kB Download document Download document
Thermoelectric process thermostats Process thermostats Operating instruction
English
PDF 2,41 MB Download document Download document

Accessories

Please use the LAUDA accessories finder for additional accessories.
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Applications and industry examples for LAUDA thermostats

Semiconductor industry

Semiconductor industry

In the production of semiconductors and testing of electronic components, there are numerous processes whose temperature must be controlled precisely.

To the application example

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